Abstract:
A sensor having a seismic mass and having an arrangement for detecting the deflection of the mass and converting it into an electrical signal; in at least one operating mode of the sensor, a mechanical stop asymmetrically limiting the deflection of the seismic mass with respect to a vibrational center position. An arrangement for symmetrical limiting of the signal provided on the sensor.
Abstract:
A circuit for converting the capacitive signal change of a differential capacitor into digital signals, the circuit including a sigma delta modulator. The differential capacitor is a component of the signal feed structure and the reference feedback structure of the sigma delta modulator.
Abstract:
A sensor having a seismic mass and having means for detecting the deflection of the mass and converting it into an electrical signal; in at least one operating mode of the sensor, a mechanical stop asymmetrically limiting the deflection of the seismic mass with respect to a vibrational center position. Means for symmetrical limiting of the signal are provided on the sensor.
Abstract:
A sensor includes a micromechanical functional part and an electronic evaluation circuit which are in electrical connection to each other using electrical conductors. An arrangement for carrying out an auto-test of the sensor is provided in such a way that fault identification of at least one electrical connection is implemented.
Abstract:
A sensor includes a micromechanical functional part and an electronic evaluation circuit which are in electrical connection to each other using electrical conductors. An arrangement for carrying out an auto-test of the sensor is provided in such a way that fault identification of at least one electrical connection is implemented.
Abstract:
A circuit for converting the capacitive signal change of a differential capacitor into digital signals, the circuit including a sigma delta modulator. The differential capacitor is a component of the signal feed structure and the reference feedback structure of the sigma delta modulator.
Abstract:
A device for detecting a wavefront that is defined by a plurality of contiguous light beams includes an array of lenslets for isolating the individual light beams and focusing each individual light beam to a focal point in an x-y plane. The device also has a plurality of clusters which are positioned in the x-y plane, and each cluster includes a plurality of pixels that are arranged in rows aligned in an x-direction, and columns aligned in a y-direction. Additionally, each pixel of a cluster includes both a first photocell for generating an x-signal and a second photocell for generating a y-signal, respectively, in response to an illumination of the pixel by a light beam. Further, the device includes circuitry for converting the x and y signals to digital signals and then using the digital signals to determine an x-y position for the focal point of the particular light beam that is incident on the cluster. A computer then compares the respective x-y positions of the various focal points to detect the wavefront. Depending on the particular application of the device, either photodiodes or phototransistors may be selected for use as the photocells in the pixels.