Invention Grant
- Patent Title: Method of manufacturing polysilicon thin film and method of manufacturing thin film transistor having the same
- Patent Title (中): 制造多晶硅薄膜的方法及其制造方法
-
Application No.: US11234609Application Date: 2005-09-23
-
Publication No.: US07557050B2Publication Date: 2009-07-07
- Inventor: Se-Jin Chung , Chi-Woo Kim , Ui-Jin Chung , Dong-Byum Kim
- Applicant: Se-Jin Chung , Chi-Woo Kim , Ui-Jin Chung , Dong-Byum Kim
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electroncis Co., Ltd.
- Current Assignee: Samsung Electroncis Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Haynes and Boone, LLP
- Priority: KR10-2005-0028628 20050406; KR10-2005-0028629 20050406; KR10-2005-0028632 20050406
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
In a method of manufacturing a polysilicon thin film and a method of manufacturing a TFT having the thin film, a laser beam is irradiated on a portion of an amorphous silicon thin film to liquefy the portion of the amorphous silicon thin film. The amorphous silicon thin film is on a first end portion of a substrate. The liquefied silicon is crystallized to form silicon grains. The laser beam is shifted from the first end portion towards a second end portion of the substrate opposite the first end portion by an interval in a first direction. The laser beam is then irradiated onto a portion of the amorphous silicon thin film adjacent to the silicon grains to form a first polysilicon thin film. Therefore, electrical characteristics of the amorphous silicon thin film may be improved.
Public/Granted literature
Information query
IPC分类: