发明授权
- 专利标题: Pixel with asymmetric transfer gate channel doping
- 专利标题(中): 具有不对称传输栅极通道掺杂的像素
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申请号: US11707848申请日: 2007-02-16
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公开(公告)号: US07557397B2公开(公告)日: 2009-07-07
- 发明人: Chintamani P. Palsule , Changhoon Choi , Fredrick P. LaMaster , John H. Stanback , Thomas E. Dungan , Thomas Joy , Homayoon Haddad
- 申请人: Chintamani P. Palsule , Changhoon Choi , Fredrick P. LaMaster , John H. Stanback , Thomas E. Dungan , Thomas Joy , Homayoon Haddad
- 申请人地址: KY Grand Cayman
- 专利权人: Aptina Imaging Corporation
- 当前专利权人: Aptina Imaging Corporation
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Ratner Prestia
- 主分类号: H01L31/06
- IPC分类号: H01L31/06 ; H01L21/00
摘要:
A pixel including a substrate of a first conductivity type and having a surface, a photodetector of a second conductivity type that is opposite the first conductivity type, a floating diffusion region of the second conductivity type, a transfer region between the photodetector and the floating diffusion, a gate positioned above the transfer region and partially overlapping the photodetector, and a pinning layer of the first conductivity type extending at least across the photodetector from the gate. A channel implant of the first conductivity type extending from between a midpoint of the transfer gate and the floating diffusion to at least across the photodiode and having a dopant concentration such that a dopant concentration of the transfer region is greater proximate to the photodetector than the floating diffusion, and wherein a peak dopant concentration of the channel implant is at a level and at a depth below the surface such that a partially-buried channel is formed in the transfer region between the photodiode and floating diffusion when the transfer gate is energized.
公开/授权文献
- US20070262355A1 Pixel with asymmetric transfer gate channel doping 公开/授权日:2007-11-15
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