发明授权
- 专利标题: Gap detection device for laser beam machine, laser beam machining system and gap detection method for laser beam machine
- 专利标题(中): 激光束机间隙检测装置,激光束加工系统和激光束机间隙检测方法
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申请号: US11554707申请日: 2006-10-31
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公开(公告)号: US07557589B2公开(公告)日: 2009-07-07
- 发明人: Takaaki Iwata , Hiroyoshi Omura , Yoshihito Imai , Teiji Takahashi
- 申请人: Takaaki Iwata , Hiroyoshi Omura , Yoshihito Imai , Teiji Takahashi
- 申请人地址: JP Tokyo
- 专利权人: Mitsubishi Electric Corporation
- 当前专利权人: Mitsubishi Electric Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Leydig, Voit & Mayer, Ltd.
- 优先权: JP2006-163185 20060613
- 主分类号: G01R27/26
- IPC分类号: G01R27/26 ; B23K9/06 ; B23K9/00
摘要:
A signal processing portion obtains the reciprocal of a composite impedance of gap static capacitance and a plasma impedance, obtains composite static capacitance which is the sum of the gap static capacitance and a static capacitance component included in the plasma impedance from an imaginary part of the reciprocal, and obtains a resistance component included in the plasma impedance from a real part of the reciprocal. A gap detection device obtains the static capacitance component by using a model representing the characteristics of the reciprocal of the plasma impedance and the resistance component and obtains the gap static capacitance by subtracting the static capacitance component from the composite static capacitance. The gap detection device obtains a gap from the obtained gap static capacitance. Thus provided is a technique to detect a gap between a nozzle of a laser beam machine for outputting a laser beam and an object to be machined with high accuracy.
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