Invention Grant
- Patent Title: Projection objective
- Patent Title (中): 投影目标
-
Application No.: US10577163Application Date: 2003-09-27
-
Publication No.: US07557902B2Publication Date: 2009-07-07
- Inventor: Udo Dinger , Frank Eisert , Stefan Koehler , Andreas Ochse , Johannes Zellner , Martin Lowisch , Timo Laufer
- Applicant: Udo Dinger , Frank Eisert , Stefan Koehler , Andreas Ochse , Johannes Zellner , Martin Lowisch , Timo Laufer
- Applicant Address: DE
- Assignee: Carl Zeiss SMT AG
- Current Assignee: Carl Zeiss SMT AG
- Current Assignee Address: DE
- Agency: GrayRobinson PA
- International Application: PCT/EP03/10761 WO 20030927
- International Announcement: WO2005/040925 WO 20050506
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G06K7/10
Abstract:
A projection objective 1 for short wavelengths, in particular for wavelengths λ
Public/Granted literature
Information query
