Abstract:
There is provided an optical component. The optical component includes a material having a surface that heats to a maximum temperature (Tmax) when subjected to radiation. The material has a temperature-dependent coefficient of thermal expansion (α(T)) of about zero at a temperature T0 that is approximately equal to Tmax. The optical component is suitable for use in any of an illumination system, a projection objective or a projection exposure system, as employed, for example, for EUV microlithography.
Abstract translation:提供了光学部件。 光学部件包括当受到辐射时具有加热到最大温度(T max max)的表面的材料。 该材料在大约等于T max max的温度T 0 0℃下具有大约为零的温度依赖的热膨胀系数(α(T))。 光学部件适用于例如用于EUV微光刻的任何照明系统,投影物镜或投影曝光系统。
Abstract:
A composite body is joined together of at least two bodies (13, 16), wherein the first body (16) is a component—or monolithically comprises a component—with very stringent requirements on the precision of its surface (typically an optical component) and wherein the second body (13) can have the broadest diversity of functions, for example carrying parts of a position-measuring arrangement or optical surfaces. Each of the two bodies (13, 16) has at least one connecting surface area (21), and the at least two respective connecting surface areas (21) lie opposite each other. Within the at least one connecting surface area (21) of one of the two bodies (13, 16) or in the proximity of said connecting surface area (21), at least one constructive means is arranged for isolating the first body (16) and/or the second body (13) from deformation.
Abstract:
A composite body is joined together of at least two bodies (13, 16), wherein the first body (16) is a component—or monolithically comprises a component—with very stringent requirements on the precision of its surface (typically an optical component) and wherein the second body (13) can have the broadest diversity of functions, for example carrying parts of a position-measuring arrangement or optical surfaces. Each of the two bodies (13, 16) has at least one connecting surface area (21), and the at least two respective connecting surface areas (21) lie opposite each other. Within the at least one connecting surface area (21) of one of the two bodies (13, 16) or in the proximity of said connecting surface area (21), at least one constructive means is arranged for isolating the first body (16) and/or the second body (13) from deformation.
Abstract:
There is provided an optical component. The optical component includes a material having a surface that heats to a maximum temperature (Tmax) when subjected to radiation. The material has a temperature-dependent coefficient of thermal expansion (α(T)) of about zero at a temperature T0 that is approximately equal to Tmax. The optical component is suitable for use in any of an illumination system, a projection objective or a projection exposure system, as employed, for example, for EUV microlithography.
Abstract translation:提供了光学部件。 光学部件包括当受到辐射时具有加热到最大温度(T max max)的表面的材料。 该材料在大约等于T max max的温度T 0 0℃下具有大约为零的温度依赖的热膨胀系数(α(T))。 光学部件适用于例如用于EUV微光刻的任何照明系统,投影物镜或投影曝光系统。