An exact centroid spectrum with a mass number corrected is determined from a profile spectrum adjacent to a plurality of peaks. Regarding a profile spectrum determined by a mass spectrometer, overlapping with adjacent peaks occurs, and compounds having a plurality of peaks with different overlapping degrees is measured, a correction function is created from a relationship between an overlapping degrees with respect to the plurality of peaks and a shift of the mass number, and a centroid peak is corrected by the correction function when the profile spectrum is converted into the centroid spectrum.