Invention Grant
- Patent Title: Manufacturing method of non-volatile memory
- Patent Title (中): 非易失性存储器的制造方法
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Application No.: US11747230Application Date: 2007-05-11
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Publication No.: US07560338B2Publication Date: 2009-07-14
- Inventor: Hsiu-Han Liao , Chi-Hung Chao , Ching-Yu Chen
- Applicant: Hsiu-Han Liao , Chi-Hung Chao , Ching-Yu Chen
- Applicant Address: TW Taichung County
- Assignee: Winbond Electronics Corp.
- Current Assignee: Winbond Electronics Corp.
- Current Assignee Address: TW Taichung County
- Agency: Jianq Chyun IP Office
- Priority: TW94109247A 20050325
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A nonvolatile memory consisting of a substrate, a dielectric layer, word lines, word gates, conductive spacers, electron trapping layer, insulation layer and buried bit lines is provided. The dielectric layer is on the substrate and has several poly trenches thereon, and the word lines are disposed over the substrate across the poly trenches. The word gates are in the poly trenches between the word lines and the substrate, and the conductive spacers are between the word gates and the inner wall of each poly trench. The electron trapping layer is disposed between the conductive spacers and the inner wall of each poly trench and between the conductive spacers and the substrate. The insulation layer is between the conductive spacers and the word gates. The buried bit lines are in the substrate between the poly trenches.
Public/Granted literature
- US20070207556A1 MANUFACTURING METHOD OF NON-VOLATILE MEMORY Public/Granted day:2007-09-06
Information query
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