发明授权
- 专利标题: Plasma-assisted processing in a manufacturing line
- 专利标题(中): 生产线中的等离子体辅助加工
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申请号: US10513605申请日: 2003-05-07
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公开(公告)号: US07560657B2公开(公告)日: 2009-07-14
- 发明人: Michael L. Dougherty, Sr. , Devendra Kumar , Satyendra Kumar
- 申请人: Michael L. Dougherty, Sr. , Devendra Kumar , Satyendra Kumar
- 申请人地址: US MA N. Billerica
- 专利权人: BTU International Inc.
- 当前专利权人: BTU International Inc.
- 当前专利权人地址: US MA N. Billerica
- 代理机构: Weingarten, Schurgin, Gagnebin & Lebovici LLP
- 国际申请: PCT/US03/14055 WO 20030507
- 国际公布: WO03/096381 WO 20031120
- 主分类号: B23K10/00
- IPC分类号: B23K10/00
摘要:
Methods and apparatus are provided for plasma-assisted processing multiple work pieces in a manufacturing line. In one embodiment, the method can include placing the work pieces in movable carriers, moving the carriers on a conveyor into an irradiation zone, flowing a gas into the irradiation zone, igniting the gas in the irradiation zone to form a plasma (e.g., by subjecting the gas to electromagnetic radiation in the presence of a plasma catalyst), sustaining the plasma for a period of time sufficient to at least partially plasma process at least one of the work pieces in the irradiation zone, and advancing the conveyor to move the at least one plasma-processed work piece out of the irradiation zone. Various types of plasma catalysts are also provided.
公开/授权文献
- US20060081567A1 Plasma-assisted processing in a manufacturing line 公开/授权日:2006-04-20
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