发明授权
- 专利标题: Nonvolatile memory device and method of manufacturing the same
- 专利标题(中): 非易失性存储器件及其制造方法
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申请号: US11594808申请日: 2006-11-09
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公开(公告)号: US07560768B2公开(公告)日: 2009-07-14
- 发明人: Cha-Won Koh , Byung-Hong Chung , Sang-Gyun Woo , Jeong-Lim Nam , Seok-Hwan Oh , Jai-Hyuk Song , Hyun Park , Yool Kang
- 申请人: Cha-Won Koh , Byung-Hong Chung , Sang-Gyun Woo , Jeong-Lim Nam , Seok-Hwan Oh , Jai-Hyuk Song , Hyun Park , Yool Kang
- 申请人地址: KR Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR10-2005-0107902 20051111
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
Provided are a nonvolatile memory device and a method of manufacturing the same. A floating gate electrode of the nonvolatile memory device may have a cross-shaped section as taken along a direction extending along a control gate electrode. The floating gate electrode may have an inverse T-shaped section as taken along a direction extending along an active region perpendicular to the control gate electrode. The floating gate electrode may include a lower gate pattern, a middle gate pattern and an upper gate pattern sequentially disposed on a gate insulation layer, in which the middle gate pattern is larger in width than the lower gate pattern and the upper gate pattern. A boundary between the middle gate pattern and the upper gate pattern may have a rounded corner.
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