Invention Grant
- Patent Title: Nonvolatile memory device and method of manufacturing the same
- Patent Title (中): 非易失性存储器件及其制造方法
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Application No.: US11594808Application Date: 2006-11-09
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Publication No.: US07560768B2Publication Date: 2009-07-14
- Inventor: Cha-Won Koh , Byung-Hong Chung , Sang-Gyun Woo , Jeong-Lim Nam , Seok-Hwan Oh , Jai-Hyuk Song , Hyun Park , Yool Kang
- Applicant: Cha-Won Koh , Byung-Hong Chung , Sang-Gyun Woo , Jeong-Lim Nam , Seok-Hwan Oh , Jai-Hyuk Song , Hyun Park , Yool Kang
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2005-0107902 20051111
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
Provided are a nonvolatile memory device and a method of manufacturing the same. A floating gate electrode of the nonvolatile memory device may have a cross-shaped section as taken along a direction extending along a control gate electrode. The floating gate electrode may have an inverse T-shaped section as taken along a direction extending along an active region perpendicular to the control gate electrode. The floating gate electrode may include a lower gate pattern, a middle gate pattern and an upper gate pattern sequentially disposed on a gate insulation layer, in which the middle gate pattern is larger in width than the lower gate pattern and the upper gate pattern. A boundary between the middle gate pattern and the upper gate pattern may have a rounded corner.
Public/Granted literature
- US20070111441A1 Nonvolatile memory device and method of manufacturing the same Public/Granted day:2007-05-17
Information query
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