发明授权
- 专利标题: Fin PIN diode
- 专利标题(中): 鳍式PIN二极管
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申请号: US11669970申请日: 2007-02-01
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公开(公告)号: US07560784B2公开(公告)日: 2009-07-14
- 发明人: Kangguo Cheng , Louis Lu-Chen Hsu , Jack Allan Mandelman
- 申请人: Kangguo Cheng , Louis Lu-Chen Hsu , Jack Allan Mandelman
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Patterson & Sheridan, LLP
- 主分类号: H01L29/76
- IPC分类号: H01L29/76
摘要:
Embodiments of the invention generally relate to the field of semiconductor devices, and more specifically to fin-based junction diodes. A portion of a doped semiconductor fin may protrude through a first doped layer. An intrinsic layer may be disposed on the protruding semiconductor fin. A second semiconductor layer may be disposed on the intrinsic layer, thereby forming a PIN diode compatible with FinFET technology and having increased junction area.
公开/授权文献
- US20080185691A1 Fin Pin Diode 公开/授权日:2008-08-07
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