发明授权
- 专利标题： Piezoelectric element and its manufacturing method
- 专利标题（中）： 压电元件及其制造方法
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申请号： US12075976申请日： 2008-03-13
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公开(公告)号： US07560854B2公开(公告)日： 2009-07-14
- 发明人: Koji Ohashi , Masao Nakayama
- 申请人： Koji Ohashi , Masao Nakayama
- 申请人地址： JP Tokyo
- 专利权人： Seiko Epson Corporation
- 当前专利权人： Seiko Epson Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Edwards Angell Palmer & Dodge LLP
- 优先权： JP2007-063306 20070313
- 主分类号： B41J2/045
- IPC分类号： B41J2/045
摘要：
A piezoelectric element includes: a base substrate; a lower electrode provided above the base substrate; a lower dummy electrode provided on the base substrate and electrically insulated from the lower electrode; a piezoelectric layer provided on the base substrate, the lower electrode and the lower dummy electrode; and an upper electrode provided on the piezoelectric layer.
公开/授权文献
- US20080224569A1 Piezoelectric element and its manufacturing method 公开/授权日：2008-09-18
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