Invention Grant
- Patent Title: Flash memory device having a split gate
- Patent Title (中): 具有分闸的闪存器件
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Application No.: US11503126Application Date: 2006-08-14
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Publication No.: US07564092B2Publication Date: 2009-07-21
- Inventor: Eui-youl Ryu , Chul-soon Kwon , Jin-woo Kim , Yong-hee Kim , Dai-geun Kim , Joo-chan Kim
- Applicant: Eui-youl Ryu , Chul-soon Kwon , Jin-woo Kim , Yong-hee Kim , Dai-geun Kim , Joo-chan Kim
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR04-31671 20040506
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/788

Abstract:
A flash memory device having a split gate that can prevent an active region and a floating gate electrode from being misaligned, and a method of manufacturing the same, includes sequentially stacking a gate oxide layer and a floating gate conductive layer on a semiconductor substrate, forming an isolation layer in a predetermined region of the semiconductor substrate where the floating gate conductive layer is formed, and defining an active region. Then, a local oxide layer is formed by oxidizing a predetermined part of the floating gate conductive layer on the active region. A floating gate electrode structure is formed by patterning the floating gate conductive layer using the local oxide layer.
Public/Granted literature
- US20070026613A1 Flash memory device having a split gate Public/Granted day:2007-02-01
Information query
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