Invention Grant
- Patent Title: Non-volatile memory devices and methods of manufacturing the same
- Patent Title (中): 非易失性存储器件及其制造方法
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Application No.: US12004985Application Date: 2007-12-21
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Publication No.: US07564094B2Publication Date: 2009-07-21
- Inventor: Dong-Hyun Kim , Chang-Jin Kang
- Applicant: Dong-Hyun Kim , Chang-Jin Kang
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec
- Priority: KR10-2006-0131603 20061221
- Main IPC: H01L21/8238
- IPC: H01L21/8238

Abstract:
Non-volatile memory devices include a tunnel insulating layer on a channel region of a substrate, a charge-trapping layer pattern on the tunnel insulating layer and a first blocking layer pattern on the charge-trapping layer pattern. Second blocking layer patterns are on the tunnel insulating layer proximate sidewalls of the charge-trapping layer pattern. The second blocking layer patterns are configured to limit lateral diffusion of electrons trapped in the charge-trapping layer pattern. A gate electrode is on the first blocking layer pattern. The second blocking layer patterns may prevent lateral diffusion of the electrons trapped in the charge-trapping layer pattern.
Public/Granted literature
- US20080150008A1 Non-volatile memory devices and methods of manufacturing the same Public/Granted day:2008-06-26
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