发明授权
- 专利标题: Crystal unit having stacked structure
- 专利标题(中): 具有堆叠结构的水晶单元
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申请号: US11964403申请日: 2007-12-26
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公开(公告)号: US07564177B2公开(公告)日: 2009-07-21
- 发明人: Masahiro Yoshimatsu , Tamotsu Kurosawa , Kozo Ono
- 申请人: Masahiro Yoshimatsu , Tamotsu Kurosawa , Kozo Ono
- 申请人地址: JP Tokyo
- 专利权人: Nihon Dempa Kogyo Co., Ltd.
- 当前专利权人: Nihon Dempa Kogyo Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Katten Muchin Rosenman LLP
- 优先权: JP2006-349911 20061226; JP2007-220478 20070828
- 主分类号: H01L41/047
- IPC分类号: H01L41/047 ; H01L41/053
摘要:
A stacked crystal unit includes: a first crystal plate in which a vibration member links to an outer circumferential frame portion, and a pair of extending electrode extends to the frame portion from excitation electrodes; and a second and third crystal plates which have a concave portion in an area opposite to the vibration member and whose open end surfaces are joined by direct bonding to both principal surfaces of the frame portion in the first crystal plate. The extending electrodes are electrically extended to an outer surface of at least one of the second and third crystal plates via electrode through-holes provided in the frame portion. The electrode through-hole includes: a first electrode through-hole penetrating through the frame portion from the principal surface of the frame portion where the extending electrode extends; and a second electrode through-hole provided in the second or third crystal plate.
公开/授权文献
- US20080150398A1 CRYSTAL UNIT HAVING STACKED STRUCTURE 公开/授权日:2008-06-26
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