Invention Grant
US07569152B2 Method for separating a useful layer and component obtained by said method
失效
用于分离由所述方法获得的有用层和组分的方法
- Patent Title: Method for separating a useful layer and component obtained by said method
- Patent Title (中): 用于分离由所述方法获得的有用层和组分的方法
-
Application No.: US10562931Application Date: 2004-07-01
-
Publication No.: US07569152B2Publication Date: 2009-08-04
- Inventor: Hubert Grange , Bernard Diem , Sylvie Viollet Bosson , Michel Borel
- Applicant: Hubert Grange , Bernard Diem , Sylvie Viollet Bosson , Michel Borel
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris
- Agency: Oliff & Berridge, PLC
- Priority: FR0308157 20030704
- International Application: PCT/FR2004/001699 WO 20040701
- International Announcement: WO2005/012160 WO 20050210
- Main IPC: C03C15/00
- IPC: C03C15/00

Abstract:
A useful layer (1) is initially attached by a sacrificial layer (2) to a layer (3) forming a substrate. Before etching of the sacrificial layer (2), at least a part of the surface (4, 5) of at least one of the layers in contact with the sacrificial layer (2) is doped. After etching of the sacrificial layer (2), the surface (4, 5) is superficially etched so as to increase the roughness of its doped part. After doping, a mask (9) is deposited on a part of the useful layer (1) so as to delineate a doped zone and a non-doped zone of the surface (4, 5), one of the zones forming a stop after the superficial etching phase.
Public/Granted literature
- US20060144816A1 Method for separating a useful layer and component obtained by said method Public/Granted day:2006-07-06
Information query