发明授权
US07569819B2 Electron beam system and method of operating the same 失效
电子束系统及其操作方法

  • 专利标题: Electron beam system and method of operating the same
  • 专利标题(中): 电子束系统及其操作方法
  • 申请号: US11873639
    申请日: 2007-10-17
  • 公开(公告)号: US07569819B2
    公开(公告)日: 2009-08-04
  • 发明人: Norihisa Mori
  • 申请人: Norihisa Mori
  • 申请人地址: JP Tokyo
  • 专利权人: JEOL Ltd.
  • 当前专利权人: JEOL Ltd.
  • 当前专利权人地址: JP Tokyo
  • 代理机构: The Webb Law Firm
  • 优先权: JP2006-282212 20061017; JP2007-138679 20070525
  • 主分类号: H01J37/26
  • IPC分类号: H01J37/26
Electron beam system and method of operating the same
摘要:
An electron beam system (such as a scanning electron microscope or an electron probe microanalyzer) capable of displaying backscattered electron (BSE) images at the same brightness and same contrast at all times if the atomic number differences are the same when illumination conditions including accelerating voltage and emission current are varied or when the specimens are imaged with different instruments.
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