发明授权
US07569845B2 Phase-change memory and fabrication method thereof 有权
相变存储器及其制造方法

Phase-change memory and fabrication method thereof
摘要:
A phase-change memory comprises a bottom electrode formed on a substrate. A first isolation layer is formed on the bottom electrode. A top electrode is formed on the isolation layer. A first phase-change material is formed in the first isolation layer, wherein the top electrode and the bottom electrode are electrically connected via the first phase-change material. Since the phase-change material can have a diameter less than the resolution limit of the photolithography process, an operating current for a state conversion of the phase-change material pattern may be reduced so as to decrease a power dissipation of the phase-change memory device.
公开/授权文献
信息查询
0/0