发明授权
- 专利标题: Phase-change memory and fabrication method thereof
- 专利标题(中): 相变存储器及其制造方法
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申请号: US11552492申请日: 2006-10-24
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公开(公告)号: US07569845B2公开(公告)日: 2009-08-04
- 发明人: Yi-Chan Chen , Wen-Han Wang
- 申请人: Yi-Chan Chen , Wen-Han Wang
- 申请人地址: TW Hsinchu TW Hsin-Chu TW Taoyuan TW Hsinchu TW Hsinchu
- 专利权人: Industrial Technology Research Institute,Powerchip Semiconductor Corp.,Nanya Technology Corporation,ProMOS Technologies Inc.,Winbond Electronics Corp.
- 当前专利权人: Industrial Technology Research Institute,Powerchip Semiconductor Corp.,Nanya Technology Corporation,ProMOS Technologies Inc.,Winbond Electronics Corp.
- 当前专利权人地址: TW Hsinchu TW Hsin-Chu TW Taoyuan TW Hsinchu TW Hsinchu
- 代理机构: Quintero Law Office
- 优先权: TW95129774A 20060814
- 主分类号: H01L47/00
- IPC分类号: H01L47/00
摘要:
A phase-change memory comprises a bottom electrode formed on a substrate. A first isolation layer is formed on the bottom electrode. A top electrode is formed on the isolation layer. A first phase-change material is formed in the first isolation layer, wherein the top electrode and the bottom electrode are electrically connected via the first phase-change material. Since the phase-change material can have a diameter less than the resolution limit of the photolithography process, an operating current for a state conversion of the phase-change material pattern may be reduced so as to decrease a power dissipation of the phase-change memory device.
公开/授权文献
- US20080035961A1 PHASE-CHANGE MEMORY AND FABRICATION METHOD THEREOF 公开/授权日:2008-02-14
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