Invention Grant
US07569846B2 Phase-change memory device including nanowires and method of manufacturing the same 有权
包括纳米线的相变存储器件及其制造方法

Phase-change memory device including nanowires and method of manufacturing the same
Abstract:
A phase-change random access memory (PRAM) device including a plurality of nanowires and a method of manufacturing the same include: a lower structure including a plurality of contact plugs; the nanowires extending into the contact plugs from surfaces defining a respective terminal end of the contact plugs; and a phase-change layer formed on top of the nanowires. Therefore, a reset or a set current consumed by the PRAM device is significantly reduced.
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