发明授权
- 专利标题： Piezo-electric substrate and manufacturing method of the same
- 专利标题（中）： 压电基板及其制造方法相同
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申请号： US11880168申请日： 2007-07-20
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公开(公告)号： US07569976B2公开(公告)日： 2009-08-04
- 发明人: Noboru Tamura , Nakaba Ichikawa , Takeshi Takabatake , Kaname Yasuda
- 申请人： Noboru Tamura , Nakaba Ichikawa , Takeshi Takabatake , Kaname Yasuda
- 申请人地址： JP Yamanashi-ken JP Kobe-shi
- 专利权人： Koike Co., Ltd.,Tocalo Co., Ltd.
- 当前专利权人： Koike Co., Ltd.,Tocalo Co., Ltd.
- 当前专利权人地址： JP Yamanashi-ken JP Kobe-shi
- 代理机构： Michaud-Duffy Group LLP
- 优先权： JP2006-204739 20060727; JP2006-204740 20060727; JP2007-045044 20070226; JP2007-045045 20070226
- 主分类号： H01L41/08
- IPC分类号： H01L41/08
摘要：
A piezo-electric substrate is mainly comprised of a base material and a film formed on one main surface of the base material. In the base material, the main surface on which the film is formed is a roughed main surface. The piezo-electric substrate is obtained by forming the film comprised of a material with a coefficient of linear expansion smaller than a coefficient of linear expansion of the base material on the roughened main surface using a thermal spraying method.
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