发明授权
- 专利标题: Method for manufacturing CMOS image sensor
- 专利标题(中): CMOS图像传感器的制造方法
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申请号: US11615096申请日: 2006-12-22
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公开(公告)号: US07572663B2公开(公告)日: 2009-08-11
- 发明人: Chang Hun Han
- 申请人: Chang Hun Han
- 申请人地址: KR Seoul
- 专利权人: Dongbu Electronics, Co., Ltd.
- 当前专利权人: Dongbu Electronics, Co., Ltd.
- 当前专利权人地址: KR Seoul
- 代理机构: Saliwanchik, Lloyd & Saliwanchik
- 优先权: KR10-2005-0132483 20051228
- 主分类号: H01L31/18
- IPC分类号: H01L31/18
摘要:
A method for manufacturing a CMOS image sensor is provided. The method can include forming an interlayer dielectric layer on a semiconductor substrate including a gate electrode, photodiode area, and LDD region; selectively removing the interlayer dielectric layer such that the interlayer dielectric layer remains on the photodiode area; performing a first heat treatment process; sequentially forming a first insulating layer and a second insulating layer on the semiconductor substrate, where the etching selectivity of the first insulating layer is different from the etching selectivity of the second insulating layer; selectively etching the second insulating layer to form spacers on sidewalls of the gate electrode; selectively removing the first insulating layer to expose a source/drain area and forming a high-density N-type diffusion area in the exposed source/drain area; performing a second heat treatment process; and forming a metal silicide layer the high-density N-type diffusion area.
公开/授权文献
- US20070148811A1 Method for Manufacturing CMOS Image Sensor 公开/授权日:2007-06-28
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