发明授权
- 专利标题： Crack trapping and arrest in thin film structures
- 专利标题（中）： 在薄膜结构中破裂捕获和捕获
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申请号： US12357721申请日： 2009-01-22
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公开(公告)号： US07573130B1公开(公告)日： 2009-08-11
- 发明人: Thomas M Shaw , Michael W Lane , Xio Hu Liu , Griselda Bonilla , James P Doyle , Howard S Landis , Eric G Liniger
- 申请人： Thomas M Shaw , Michael W Lane , Xio Hu Liu , Griselda Bonilla , James P Doyle , Howard S Landis , Eric G Liniger
- 申请人地址： US NY Armonk
- 专利权人： Internatonal Business Machines Corporation
- 当前专利权人： Internatonal Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理商 Leander F. Aulisio
- 主分类号： H01L23/44
- IPC分类号： H01L23/44
摘要：
The present invention relates to a process for preparing a robust crack-absorbing integrated circuit chip comprising a crack trapping structure containing two metal plates and a via-bar structure sandwiched between said plates.
信息查询
IPC分类:
