Invention Grant
US07576017B2 Method and apparatus for forming a thin-film solar cell using a continuous process
失效
使用连续工艺形成薄膜太阳能电池的方法和装置
- Patent Title: Method and apparatus for forming a thin-film solar cell using a continuous process
- Patent Title (中): 使用连续工艺形成薄膜太阳能电池的方法和装置
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Application No.: US11271583Application Date: 2005-11-10
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Publication No.: US07576017B2Publication Date: 2009-08-18
- Inventor: John R. Tuttle
- Applicant: John R. Tuttle
- Applicant Address: US NY Halfmoon
- Assignee: DayStar Technologies, Inc.
- Current Assignee: DayStar Technologies, Inc.
- Current Assignee Address: US NY Halfmoon
- Agency: Hiscock & Barclay, LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; C23C16/00
Abstract:
The present invention relates to new methods for manufacturing photovoltaic devices and an apparatus for practicing those methods of manufacture. The present invention employs a transfer-through system for advancing work piece substrates through an integrated apparatus of multiple treatment chambers that control each of the manufacturing processes.
Public/Granted literature
- US20060096537A1 Method and apparatus for forming a thin-film solar cell using a continuous process Public/Granted day:2006-05-11
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