发明授权
- 专利标题: Assembly for reducing oxidation of semiconductor devices
- 专利标题(中): 用于减少半导体器件氧化的组件
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申请号: US12134404申请日: 2008-06-06
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公开(公告)号: US07578423B1公开(公告)日: 2009-08-25
- 发明人: Rong Duan , Zhao Ya Rui , Pei Bei Xu
- 申请人: Rong Duan , Zhao Ya Rui , Pei Bei Xu
- 申请人地址: SG Singapore
- 专利权人: ASM Technology Singapore Pte Ltd.
- 当前专利权人: ASM Technology Singapore Pte Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Ostrolenk, Faber, Gerb & Soffen, LLP
- 主分类号: B23K37/04
- IPC分类号: B23K37/04
摘要:
An assembly for reducing oxidation of a semiconductor device comprises a holding device for securing the semiconductor device to a platform. The holding device includes at least one opening for providing access by a bonding tool to bonding areas where the semiconductor device is to be bonded. A slidable cover covers the holding device and has a slot for providing access by the bonding tool to the bonding areas through the slot. A guiding device is positioned on the slidable cover and is coupled to a pusher which is operative to push the slidable cover to move along a first axis. The pusher is further guided by the guiding device to move relative to the slidable cover along a second axis which is perpendicular to the first axis without pushing the slidable cover to move in the second axis.
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