Invention Grant
US07579249B2 Methods for fabricating DRAM semiconductor devices including silicon epitaxial and metal silicide layers
失效
制造包括硅外延和金属硅化物层的DRAM半导体器件的方法
- Patent Title: Methods for fabricating DRAM semiconductor devices including silicon epitaxial and metal silicide layers
- Patent Title (中): 制造包括硅外延和金属硅化物层的DRAM半导体器件的方法
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Application No.: US11688554Application Date: 2007-03-20
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Publication No.: US07579249B2Publication Date: 2009-08-25
- Inventor: Chul-sung Kim , Byeong-chan Lee , Jong-ryeol Yoo , Si-young Choi , Deok-hyung Lee
- Applicant: Chul-sung Kim , Byeong-chan Lee , Jong-ryeol Yoo , Si-young Choi , Deok-hyung Lee
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec, P.A.
- Priority: KR2002-0045893 20020802
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
Provided are a DRAM semiconductor device and a method for fabricating the DRAM semiconductor device. The method provides forming a silicon epitaxial layer on a source/drain region of a cell region and a peripheral circuit region using selective epitaxial growth (SEG), thereby forming a raised active region. In addition, in the DRAM semiconductor device, a metal silicide layer and a metal pad are formed on the silicon epitaxial layer in the source/drain region of the cell region. By doing this, the DRAM device is capable of forming a source/drain region as a shallow junction region, reducing the occurrence of leakage current and lowering the contact resistance with the source/drain region.
Public/Granted literature
- US20070178642A1 METHODS FOR FABRICATING DRAM SEMICONDUCTOR DEVICES INCLUDING SILICON EPITAXIAL AND METAL SILICIDE LAYERS Public/Granted day:2007-08-02
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