Invention Grant
US07579249B2 Methods for fabricating DRAM semiconductor devices including silicon epitaxial and metal silicide layers 失效
制造包括硅外延和金属硅化物层的DRAM半导体器件的方法

Methods for fabricating DRAM semiconductor devices including silicon epitaxial and metal silicide layers
Abstract:
Provided are a DRAM semiconductor device and a method for fabricating the DRAM semiconductor device. The method provides forming a silicon epitaxial layer on a source/drain region of a cell region and a peripheral circuit region using selective epitaxial growth (SEG), thereby forming a raised active region. In addition, in the DRAM semiconductor device, a metal silicide layer and a metal pad are formed on the silicon epitaxial layer in the source/drain region of the cell region. By doing this, the DRAM device is capable of forming a source/drain region as a shallow junction region, reducing the occurrence of leakage current and lowering the contact resistance with the source/drain region.
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