发明授权
US07579274B2 Method and compositions for direct copper plating and filing to form interconnects in the fabrication of semiconductor devices
有权
用于在半导体器件的制造中直接镀铜和填充以形成互连的方法和组合物
- 专利标题: Method and compositions for direct copper plating and filing to form interconnects in the fabrication of semiconductor devices
- 专利标题(中): 用于在半导体器件的制造中直接镀铜和填充以形成互连的方法和组合物
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申请号: US11708293申请日: 2007-02-20
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公开(公告)号: US07579274B2公开(公告)日: 2009-08-25
- 发明人: José Gonzalez , Hervé Monchoix
- 申请人: José Gonzalez , Hervé Monchoix
- 申请人地址: FR Massy
- 专利权人: Alchimer
- 当前专利权人: Alchimer
- 当前专利权人地址: FR Massy
- 代理机构: Hamre, Schumann, Mueller & Larson, P.C.
- 主分类号: H01L21/44
- IPC分类号: H01L21/44
摘要:
The object of the present invention is a method and compositions for direct copper plating and filling to form interconnects in the fabrication of semiconductor devices.According to the invention, this method comprises: providing an electrolytic copper bath containing, in solution in a solvent, a source of copper ions with a concentration of between 45 and 200 mM, preferably of between 45 and 100 mM and at least one copper complexing agent which is an aliphatic polyamine having 2 to 4 amine functions with a concentration of between 30 and 200 mM, preferably of between 60 and 200 mM; the copper/complexing agent(s) molar ratio being of between 0.2 and 2, preferably between 0.3 and 1.5; bringing said copper diffusion barrier layer of said substrate into contact with said electrolytic copper bath, applying an electrical bias to the substrate for a duration adjusted according to the thickness of copper to be electroplated, removing the substrate from said electrolytic copper bath.
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