发明授权
- 专利标题: Probe holder for a probe for testing semiconductor components
- 专利标题(中): 用于测试半导体元件的探头的探头支架
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申请号: US11674430申请日: 2007-02-13
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公开(公告)号: US07579849B2公开(公告)日: 2009-08-25
- 发明人: Jorg Kiesewetter , Stefan Kreissig , Stojan Kanev
- 申请人: Jorg Kiesewetter , Stefan Kreissig , Stojan Kanev
- 申请人地址: DE Sacka
- 专利权人: SUSS MicroTec Test Systems GmbH
- 当前专利权人: SUSS MicroTec Test Systems GmbH
- 当前专利权人地址: DE Sacka
- 代理机构: Heslin Rothenberg Farley & Mesiti P.C.
- 代理商 Victor A. Cardona, Esq.
- 优先权: DE102006056646 20061129
- 主分类号: G01R31/02
- IPC分类号: G01R31/02
摘要:
A probe holder in which the probe needle has a slight horizontal offset under the action of a vertical force, includes a probe holder for a probe needle, wherein the holder is adapted, for fastening and electrical contact-connection, on a carrier device of a test apparatus and has a holder arm having a needle holder at the free end thereof to fasten the probe needle, and a fastening arm for connecting the probe holder to the carrier device. The holder arm and the fastening arm are connected to one another by an articulated joint, whereby horizontal offset of the needle tip on account of external forces can be reduced or even prevented by increasing the radius of the yielding movement of the probe needle.