Invention Grant
US07580135B2 Chromatic compensation in Fizeau interferometer 有权
斐索干涉仪中的色彩补偿

  • Patent Title: Chromatic compensation in Fizeau interferometer
  • Patent Title (中): 斐索干涉仪中的色彩补偿
  • Application No.: US11821223
    Application Date: 2007-06-22
  • Publication No.: US07580135B2
    Publication Date: 2009-08-25
  • Inventor: John Hayes
  • Applicant: John Hayes
  • Applicant Address: US AZ Tucson
  • Assignee: 4D Technology Corporation
  • Current Assignee: 4D Technology Corporation
  • Current Assignee Address: US AZ Tucson
  • Agent Antonio R. Durando
  • Main IPC: G01B9/02
  • IPC: G01B9/02
Chromatic compensation in Fizeau interferometer
Abstract:
The focus of the collimating lens in the optical train of a Fizeau interferometer is adjusted to change the power of the test beam illuminating the transmission sphere. As a result, the rays can be made sufficiently perpendicular to the reference surface to eliminate the chromatic focus shift and non-common path errors produced by a light source of wavelength different from the design wavelength of the transmission sphere. By making the position of the collimating lens relative to the beam expander adjustable along the optical axis over some small range, illumination sources of various wavelength can be used in the same interferometer.
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