Invention Grant
- Patent Title: CMOS image sensor and method for manufacturing the same
- Patent Title (中): CMOS图像传感器及其制造方法
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Application No.: US11319596Application Date: 2005-12-29
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Publication No.: US07582504B2Publication Date: 2009-09-01
- Inventor: Chang Hun Han
- Applicant: Chang Hun Han
- Applicant Address: KR Seoul
- Assignee: Dongbu Electronics, Co., Ltd.
- Current Assignee: Dongbu Electronics, Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: McKenna Long & Aldridge LLP
- Priority: KR10-2004-0116520 20041230
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/062 ; H01L31/113

Abstract:
A CMOS image sensor and a method for manufacturing the same are provided, in which a nitride layer for passivation is used as a microlens to reduce topology. The CMOS image sensor includes an upper metal layer partially deposited on a dielectric layer; a first nitride layer deposited on the upper metal layer; an undoped silicon glass layer deposited on the first nitride layer and polished by chemical-mechanical polishing; color filter array elements deposited and exposed on the undoped silicon glass layer and polished by the chemical-mechanical polishing; and a second nitride layer deposited on the first nitride layer and the color filter array elements and transfer-etched after forming a sacrificial microlens on the second nitride layer.
Public/Granted literature
- US20060145211A1 CMOS image sensor and method for manufacturing the same Public/Granted day:2006-07-06
Information query
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