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US07585202B2 Computer-implemented method for process control in chemical mechanical polishing 失效
化学机械抛光过程控制计算机实现方法

Computer-implemented method for process control in chemical mechanical polishing
摘要:
A computer-implemented method for process control in chemical mechanical polishing in which an initial pre-polishing thickness of a substrate is measured at a metrology station, a parameter of an endpoint algorithm is determined from the initial thickness of the substrate, a substrates is polished at a polishing station, and polishing stops when an endpoint criterion is detected using the endpoint algorithm.
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