发明授权
- 专利标题: Computer-implemented method for process control in chemical mechanical polishing
- 专利标题(中): 化学机械抛光过程控制计算机实现方法
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申请号: US11923082申请日: 2007-10-24
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公开(公告)号: US07585202B2公开(公告)日: 2009-09-08
- 发明人: Boguslaw A. Swedek , Bret W. Adams , Sanjay Rajaram , David A. Chan , Manoocher Birang
- 申请人: Boguslaw A. Swedek , Bret W. Adams , Sanjay Rajaram , David A. Chan , Manoocher Birang
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Fish & Richardson
- 主分类号: B24B49/00
- IPC分类号: B24B49/00 ; B24B51/00 ; B24B1/00
摘要:
A computer-implemented method for process control in chemical mechanical polishing in which an initial pre-polishing thickness of a substrate is measured at a metrology station, a parameter of an endpoint algorithm is determined from the initial thickness of the substrate, a substrates is polished at a polishing station, and polishing stops when an endpoint criterion is detected using the endpoint algorithm.
公开/授权文献
- US20080064300A1 Polishing System With In-Line and In-Situ Metrology 公开/授权日:2008-03-13
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