发明授权
US07585689B2 Method for manufacturing semiconductor laser device and method for inspecting semiconductor laser bar 失效
半导体激光器件的制造方法及半导体激光棒的检查方法

Method for manufacturing semiconductor laser device and method for inspecting semiconductor laser bar
摘要:
A method for manufacturing a semiconductor laser device in which a first conductivity type cladding layer, and active layer, a second conductivity type first cladding layer, and a second conductivity type second cladding layer are laminated in this order on a semiconductor substrate by crystal growth, the second conductivity type second cladding layer is processed into a plurality of stripe-shaped ridge structure portions, and a laser bar is formed by cleavage in a direction orthogonal to a longitudinal direction of the ridge structure portions. According to this method, it is possible to provide a method for manufacturing a semiconductor laser device and a method for inspecting a semiconductor laser bar in the manufacturing process, capable of determining for each chip whether or not a deviation of a resonator length is within the tolerance in a simple manner.
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