发明授权
- 专利标题: Method for manufacturing semiconductor laser device and method for inspecting semiconductor laser bar
- 专利标题(中): 半导体激光器件的制造方法及半导体激光棒的检查方法
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申请号: US12196902申请日: 2008-08-22
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公开(公告)号: US07585689B2公开(公告)日: 2009-09-08
- 发明人: Takayuki Kashima , Keiji Ito , Kouji Makita
- 申请人: Takayuki Kashima , Keiji Ito , Kouji Makita
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: Hamre, Schumann, Mueller & Larson, P.C.
- 优先权: JP2007-217393 20070823
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A method for manufacturing a semiconductor laser device in which a first conductivity type cladding layer, and active layer, a second conductivity type first cladding layer, and a second conductivity type second cladding layer are laminated in this order on a semiconductor substrate by crystal growth, the second conductivity type second cladding layer is processed into a plurality of stripe-shaped ridge structure portions, and a laser bar is formed by cleavage in a direction orthogonal to a longitudinal direction of the ridge structure portions. According to this method, it is possible to provide a method for manufacturing a semiconductor laser device and a method for inspecting a semiconductor laser bar in the manufacturing process, capable of determining for each chip whether or not a deviation of a resonator length is within the tolerance in a simple manner.
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