Invention Grant
US07586175B2 Semiconductor wafer having embedded electroplating current paths to provide uniform plating over wafer surface 有权
半导体晶片具有嵌入的电镀电流路径,以在晶片表面上提供均匀的电镀

Semiconductor wafer having embedded electroplating current paths to provide uniform plating over wafer surface
Abstract:
A semiconductor wafer having multi-layer metallization structures that are fabricated to include embedded interconnection structures which serve as low-resistance electroplating current paths to conduct bulk electroplating current fed to portions of a metallic seed layer at peripheral surface regions of the wafer to portions of the metallic seed layer at inner/central surface regions of the semiconductor wafer to achieve uniformity in metal plating in chip regions across the wafer.
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