Invention Grant
US07586175B2 Semiconductor wafer having embedded electroplating current paths to provide uniform plating over wafer surface
有权
半导体晶片具有嵌入的电镀电流路径,以在晶片表面上提供均匀的电镀
- Patent Title: Semiconductor wafer having embedded electroplating current paths to provide uniform plating over wafer surface
- Patent Title (中): 半导体晶片具有嵌入的电镀电流路径,以在晶片表面上提供均匀的电镀
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Application No.: US11551864Application Date: 2006-10-23
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Publication No.: US07586175B2Publication Date: 2009-09-08
- Inventor: Kyoung Woo Lee , Ja Hum Ku , Ki Chul Park , Seung Man Choi
- Applicant: Kyoung Woo Lee , Ja Hum Ku , Ki Chul Park , Seung Man Choi
- Applicant Address: KR Suwon-Si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-Si
- Agency: F. Chau & Associates, LLC
- Main IPC: H01L23/544
- IPC: H01L23/544 ; H01L21/4763

Abstract:
A semiconductor wafer having multi-layer metallization structures that are fabricated to include embedded interconnection structures which serve as low-resistance electroplating current paths to conduct bulk electroplating current fed to portions of a metallic seed layer at peripheral surface regions of the wafer to portions of the metallic seed layer at inner/central surface regions of the semiconductor wafer to achieve uniformity in metal plating in chip regions across the wafer.
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