发明授权
US07587912B2 Method for producing quartz glass crucible for use in pulling silicon single crystal and quartz glass crucible produced by said method
有权
用于拉制由所述方法生产的硅单晶和石英玻璃坩埚中使用的石英玻璃坩埚的方法
- 专利标题: Method for producing quartz glass crucible for use in pulling silicon single crystal and quartz glass crucible produced by said method
- 专利标题(中): 用于拉制由所述方法生产的硅单晶和石英玻璃坩埚中使用的石英玻璃坩埚的方法
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申请号: US10547053申请日: 2004-02-20
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公开(公告)号: US07587912B2公开(公告)日: 2009-09-15
- 发明人: Yasuo Ohama , Hiroshi Matsui
- 申请人: Yasuo Ohama , Hiroshi Matsui
- 申请人地址: DE Hanau JP Tokyo
- 专利权人: Heraeus Quarzglas GmbH & Co. KG,Shin-Etsu Quartz Products Co., Ltd.
- 当前专利权人: Heraeus Quarzglas GmbH & Co. KG,Shin-Etsu Quartz Products Co., Ltd.
- 当前专利权人地址: DE Hanau JP Tokyo
- 代理机构: Tiajoloff and Kelly LLP
- 优先权: JP2003-052704 20030228
- 国际申请: PCT/EP2004/001663 WO 20040220
- 国际公布: WO2004/076725 WO 20040910
- 主分类号: C03B19/09
- IPC分类号: C03B19/09
摘要:
The present invention refers to a method for producing a quartz glass crucible for use in pulling silicon single crystal, said crucible having at least a double-layer structure comprising a pore-free transparent inner layer and an opaque base body or outer layer having pores, characterized in that at least the base body is formed with a silica powder maintained in a gas having a mixing ratio of 0.0005 to 0.0065 kg/kg (dry gas), and a quartz glass crucible produced by said production method. The obtained crucible has an average OH group concentration of 50 ppm or lower and is capable of suppressing the vibration occurring on the surface of silicon melt during pulling the silicon single crystal. Further the obtained crucible suffers less deformation of the crucible on pulling the silicon single crystal.
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