Invention Grant
US07589376B2 Electrically erasable programmable read-only memory (EEPROM) device and methods of fabricating the same
失效
电可擦除可编程只读存储器(EEPROM)器件及其制造方法
- Patent Title: Electrically erasable programmable read-only memory (EEPROM) device and methods of fabricating the same
- Patent Title (中): 电可擦除可编程只读存储器(EEPROM)器件及其制造方法
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Application No.: US12199307Application Date: 2008-08-27
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Publication No.: US07589376B2Publication Date: 2009-09-15
- Inventor: Jae-Hwang Kim , Seung-Beom Yoon , Kwang-Wook Koh , Chang-Hun Lee , Sung-Ho Kim , Sung-Chul Park , Ju-Ri Kim
- Applicant: Jae-Hwang Kim , Seung-Beom Yoon , Kwang-Wook Koh , Chang-Hun Lee , Sung-Ho Kim , Sung-Chul Park , Ju-Ri Kim
- Applicant Address: KR Suwon-Si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-Si
- Agency: F. Chau & Associates, LLC
- Priority: KR2004-81861 20041013
- Main IPC: H01L29/94
- IPC: H01L29/94

Abstract:
An EEPROM device includes a device isolation layer disposed at a predetermined region of a semiconductor substrate to define active regions, a pair of control gates crossing the device isolation layers and an active region, a pair of selection gates interposed between the control gates to cross the device isolation layers and the active region and a floating gate and an intergate dielectric pattern stacked sequentially between the control gates and the active region The EEPROM device further includes a gate insulation layer of a memory transistor interposed between the floating gate and the active region and a tunnel insulation layer thinner than the gate insulation layer of the memory transistor and a gate insulation layer of a selection transistor interposed between the selection gates and the active region. The tunnel insulation layer is aligned at one side adjacent to the floating gate.
Public/Granted literature
- US20080315289A1 ELECTRICALLY ERASABLE PROGRAMMABLE READ-ONLY MEMORY (EEPROM) DEVICE AND METHODS OF FABRICATING THE SAME Public/Granted day:2008-12-25
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