Invention Grant
- Patent Title: Non-volatile memory devices having floating gates
- Patent Title (中): 具有浮动门的非易失性存储器件
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Application No.: US11594327Application Date: 2006-11-08
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Publication No.: US07592665B2Publication Date: 2009-09-22
- Inventor: Joon-Hee Lee , Jong-Ho Park , Jin-Hyun Shin , Sung-Hoi Hur , Yong-Seok Kim , Jong-Won Kim
- Applicant: Joon-Hee Lee , Jong-Ho Park , Jin-Hyun Shin , Sung-Hoi Hur , Yong-Seok Kim , Jong-Won Kim
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Myers Bigel Sibley & Sajovec, P.A.
- Priority: KR10-2005-0107907 20051111
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
A nonvolatile memory device may include a substrate having a cell region, and a cell device isolation layer on the cell region of the substrate to define a cell active region. A floating gate may include a lower floating gate and an upper floating gate sequentially stacked on the cell active region, and a tunnel insulation pattern may be between the floating gate and the cell active region. A control gate electrode may be on the floating gate, and a blocking insulation pattern may be between the control gate electrode and the floating gate. More particularly, the upper floating gate may include a flat portion on the lower floating gate and a pair of wall portions extending upward from both edges of the flat portion adjacent to the cell device isolation layer. Moreover, a width of an upper portion of a space surrounded by the flat portion and the pair of wall portions may be larger than a width of a lower portion of the space. Related methods are also discussed.
Public/Granted literature
- US20070108498A1 Non-volatile memory devices having floating gates and related methods of forming the same Public/Granted day:2007-05-17
Information query
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