发明授权
US07593556B2 Sample picture data processing method and sample inspection system and method
失效
样本图像数据处理方法和样本检查系统及方法
- 专利标题: Sample picture data processing method and sample inspection system and method
- 专利标题(中): 样本图像数据处理方法和样本检查系统及方法
-
申请号: US10696627申请日: 2003-10-28
-
公开(公告)号: US07593556B2公开(公告)日: 2009-09-22
- 发明人: Nakahiro Yasuda , Eric Benton , Hitoshi Ishii , Sumiko Takayama , Shinsuke Inagaki , Isao Kobayashi , Atsushi Higashimata , Yoshihiro Honma , Yosuke Umeshima
- 申请人: Nakahiro Yasuda , Eric Benton , Hitoshi Ishii , Sumiko Takayama , Shinsuke Inagaki , Isao Kobayashi , Atsushi Higashimata , Yoshihiro Honma , Yosuke Umeshima
- 申请人地址: JP JP
- 专利权人: National Institute of Radiological Sciences,SEIKO Precision Inc.
- 当前专利权人: National Institute of Radiological Sciences,SEIKO Precision Inc.
- 当前专利权人地址: JP JP
- 代理机构: Adams & Wilks
- 优先权: JP2002-314878 20021029; JP2002-314879 20021029
- 主分类号: G06K9/00
- IPC分类号: G06K9/00
摘要:
A sample inspection system has line sensors that generate sample picture data for layers of a sample disposed at different depths of the sample. The line sensors are arranged parallel to each other and displaced from each other in a vertical direction relative to the sample. A lens system focuses the layers of the sample at the different sample depths on the respective line sensors so that pictures of the layers at the different sample depths are read as line picture data by the line sensors. The sample inspection system includes an apparatus that stores the generated sample picture data, allows a planar region of the sample to be designated by a user for display, extracts picture data corresponding to the designated planar region for each of the sample layers from the sample picture data in response to designation of the planar region, and stores the extracted picture data as a set. An image processing apparatus displays on a display pictures corresponding to the extracted picture data of the respective layers by one of selectively displaying each picture individually in an alternating manner and simultaneously displaying two or more of the pictures together in a parallel or superposed manner.
公开/授权文献
信息查询