公开(公告)号：US20070127842A1

公开(公告)日：2007-06-07

申请号：US10696627

申请日：2003-10-28

申请人： Nakahiro Yasuda ,  Eric Benton ,  Hitoshi Ishii ,  Sumiko Takayama ,  Shinsuke Inagaki ,  Isao Kobayashi ,  Atsushi Higashimata ,  Yoshihiro Honma ,  Yosuke Umeshima

发明人： Nakahiro Yasuda ,  Eric Benton ,  Hitoshi Ishii ,  Sumiko Takayama ,  Shinsuke Inagaki ,  Isao Kobayashi ,  Atsushi Higashimata ,  Yoshihiro Honma ,  Yosuke Umeshima

IPC分类号： G06K9/36

CPC分类号： G06T1/0007 ,  G01N15/1468 ,  G06T2207/10056 ,  G06T2207/30024 ,  H04N13/236 ,  H04N13/271

摘要： A sample inspection system and method for displaying images of plural sample layers and a predetermined planar region within an image having a very large imaging region. Line sensors generate sample picture data for the plurality of sample layers, a computer stores the generated sample picture data, allows a planar region to be designated by a user for display, extracts picture data corresponding to the designated planar region for each of the respective layers from the sample picture data in response to designation of the planar region, and stores the extracted picture data as a set, and an image processing apparatus for displaying extracted pictures of the respective layers on a display in either an alternative way in which each picture may be selectively displayed individually and alternately, or simultaneously in which two or more of the pictures may be displayed together in a parallel or superposed manner.

摘要翻译： 一种用于在具有非常大的成像区域的图像内显示多个样本层和预定平面区域的图像的样本检查系统和方法。 线传感器生成多个样本层的样本图像数据，计算机存储生成的样本图像数据，允许由用户指定平面区域进行显示，提取与各个层的每个层对应的指定平面区域的图像数据 并且将所提取的图像数据作为一组存储，以及图像处理装置，用于在显示器上以各种图像可选择的方式显示各层的提取图像 可以单独和交替地或同时地选择性地显示两个或更多个图像可以以并行或重叠的方式一起显示。

公开(公告)号：US07593556B2

公开(公告)日：2009-09-22

申请号：US10696627

申请日：2003-10-28

申请人： Nakahiro Yasuda ,  Eric Benton ,  Hitoshi Ishii ,  Sumiko Takayama ,  Shinsuke Inagaki ,  Isao Kobayashi ,  Atsushi Higashimata ,  Yoshihiro Honma ,  Yosuke Umeshima

发明人： Nakahiro Yasuda ,  Eric Benton ,  Hitoshi Ishii ,  Sumiko Takayama ,  Shinsuke Inagaki ,  Isao Kobayashi ,  Atsushi Higashimata ,  Yoshihiro Honma ,  Yosuke Umeshima

IPC分类号： G06K9/00

CPC分类号： G06T1/0007 ,  G01N15/1468 ,  G06T2207/10056 ,  G06T2207/30024 ,  H04N13/236 ,  H04N13/271

摘要： A sample inspection system has line sensors that generate sample picture data for layers of a sample disposed at different depths of the sample. The line sensors are arranged parallel to each other and displaced from each other in a vertical direction relative to the sample. A lens system focuses the layers of the sample at the different sample depths on the respective line sensors so that pictures of the layers at the different sample depths are read as line picture data by the line sensors. The sample inspection system includes an apparatus that stores the generated sample picture data, allows a planar region of the sample to be designated by a user for display, extracts picture data corresponding to the designated planar region for each of the sample layers from the sample picture data in response to designation of the planar region, and stores the extracted picture data as a set. An image processing apparatus displays on a display pictures corresponding to the extracted picture data of the respective layers by one of selectively displaying each picture individually in an alternating manner and simultaneously displaying two or more of the pictures together in a parallel or superposed manner.

摘要翻译： 样品检查系统具有生成样品图像数据的线传感器，其用于设置在样品不同深度处的样品层。 线传感器彼此平行布置，并相对于样品在垂直方向上相互错位。 透镜系统将样品的各层聚焦在相应线传感器上的不同样品深度处，使得在不同采样深度处的层的图像被线传感器读取为线图像数据。 样本检查系统包括存储生成的样本图像数据的装置，允许由用户指定样本的平面区域进行显示，从样本图像中提取与每个样本层相对应的指定平面区域的图像数据 响应于平面区域的指定的数据，并且将提取的图像数据存储为一组。 图像处理装置通过以交替的方式单独选择性地显示每个图像并且以并行或重叠的方式一起同时显示两个或更多个图片，来显示与所提取的各个图层的图像数据相对应的图像。