发明授权
- 专利标题: Capacitor and method for fabricating the same
- 专利标题(中): 电容器及其制造方法
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申请号: US11201306申请日: 2005-08-11
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公开(公告)号: US07595526B2公开(公告)日: 2009-09-29
- 发明人: Dong-Woo Shin , Hyung-Bok Choi
- 申请人: Dong-Woo Shin , Hyung-Bok Choi
- 申请人地址: KR Ichon-shi, Kyungki-do
- 专利权人: Hynix Semiconductor Inc.
- 当前专利权人: Hynix Semiconductor Inc.
- 当前专利权人地址: KR Ichon-shi, Kyungki-do
- 代理机构: Lowe Hauptman Ham & Berner, LLP
- 优先权: KR2002-56445 20020917
- 主分类号: H01L29/94
- IPC分类号: H01L29/94
摘要:
A method for manufacturing a capacitor in a semiconductor device for securing capacitance without a merging phenomenon during a MPS grain growth process. The manufacturing step begins with a preparation of a substrate. The interlayer dielectric (ILD) layer is formed on the substrate and is etched to form conductive plug. Then, an etch barrier layer and a sacrifice insulating layer are formed on entire surface subsequently. A cylinder typed first electrode is formed over the conductive plug using the sacrifice insulating layer. Thereafter, first meta-stable poly silicon (MPS) grains are formed on inner wall of the first electrode except a bottom region thereof. However, second MPS grains with small sizes can be formed in the bottom region for increasing a storage area of the first electrode. Finally, a dielectric layer and a second electrode are formed on the first electrode subsequently.
公开/授权文献
- US20050269618A1 Capacitor and method for fabricating the same 公开/授权日:2005-12-08
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