发明授权
US07596990B2 Method and apparatus for obtaining quantitative measurements using a probe based instrument
有权
用于使用基于探针的仪器获得定量测量的方法和装置
- 专利标题: Method and apparatus for obtaining quantitative measurements using a probe based instrument
- 专利标题(中): 用于使用基于探针的仪器获得定量测量的方法和装置
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申请号: US11106366申请日: 2005-04-14
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公开(公告)号: US07596990B2公开(公告)日: 2009-10-06
- 发明人: Chanmin Su , Nghi Phan , Craig Prater
- 申请人: Chanmin Su , Nghi Phan , Craig Prater
- 申请人地址: US NY Woodbury
- 专利权人: Veeco Instruments, Inc.
- 当前专利权人: Veeco Instruments, Inc.
- 当前专利权人地址: US NY Woodbury
- 代理机构: Boyle Fredrickson, S.C.
- 主分类号: G01B5/28
- IPC分类号: G01B5/28 ; G01N13/16
摘要:
A cantilever probe-based instrument is controlled to counteract the lateral loads imposed on the probe as a result of probe sample interaction. The probe preferably includes an active cantilever, such as a so-called bimorph cantilever. Force counteraction is preferably achieved by monitoring a lateral force-dependent property of probe operation such as cantilever free end deflection angle and applying a voltage to at least one of the cantilever and one or more separate actuators under feedback to maintain that property constant as the probe-sample spacing decreases. The probe could further uses at least one of contact flexural and torsional resonances characteristics to determine contact and release points. With the knowledge of the tip profile, quantitative mechanical data for probe sample interaction can be obtained.
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