发明授权
- 专利标题： Pad conditioning device with flexible media mount
- 专利标题（中）： 带有柔性介质安装的垫片调节装置
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申请号： US11928677申请日： 2007-10-30
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公开(公告)号： US07597608B2公开(公告)日： 2009-10-06
- 发明人: Shou-Sung Chang , Steven M. Zuniga
- 申请人： Shou-Sung Chang , Steven M. Zuniga
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Patterson & Sheridan, LLP
- 主分类号： B24B1/00
- IPC分类号： B24B1/00
摘要：
A method and apparatus for conditioning is provided. In one embodiment, a conditioning disk includes a plurality of conditioning elements each having an abrasive working surface, and a flexible foundation having the conditioning elements coupled thereto. The flexible foundation has physical properties that retain the working surfaces in a substantially coplanar orientation with respect to the pad surface.
公开/授权文献
- US20080102737A1 PAD CONDITIONING DEVICE WITH FLEXIBLE MEDIA MOUNT 公开/授权日：2008-05-01
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