发明授权
- 专利标题: Semiconductor chip and method for manufacturing the same and semiconductor device
- 专利标题(中): 半导体芯片及其制造方法及半导体器件
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申请号: US11143672申请日: 2005-06-03
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公开(公告)号: US07598590B2公开(公告)日: 2009-10-06
- 发明人: Masaya Kawano , Tsutomu Tashiro , Yoichiro Kurita
- 申请人: Masaya Kawano , Tsutomu Tashiro , Yoichiro Kurita
- 申请人地址: JP Kanagawa
- 专利权人: NEC Electronics Corporation
- 当前专利权人: NEC Electronics Corporation
- 当前专利权人地址: JP Kanagawa
- 代理机构: Sughrue Mion, PLLC
- 优先权: JP2004-194658 20040630
- 主分类号: H01L29/66
- IPC分类号: H01L29/66
摘要:
The semiconductor chip 1 has a semiconductor substrate 10. In the present embodiment, the semiconductor substrate 10, which is an SOI substrate, is constituted by comprising a support substrate 12, an insulating layer 14 formed on the support substrate 12 with a layered structure, and a silicon layer 16 formed on the insulating layer 14 with the layered structure. The semiconductor substrate 10 has a circuit forming region A1 provided in the silicon layer 16. An insulating region 18 is provided on the semiconductor substrate 10. The insulating region 18 is provided so as to surround the entire side face of the circuit forming region A1.
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