发明授权
- 专利标题: Piezoelectric thin-film resonator and filter using the same
- 专利标题(中): 压电薄膜谐振器和使用其的滤波器
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申请号: US11976608申请日: 2007-10-25
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公开(公告)号: US07602101B2公开(公告)日: 2009-10-13
- 发明人: Motoaki Hara , Tokihiro Nishihara , Masanori Ueda , Go Endo
- 申请人: Motoaki Hara , Tokihiro Nishihara , Masanori Ueda , Go Endo
- 申请人地址: JP Yokohama JP Kawasaki
- 专利权人: Fujitsu Media Devices,Fujitsu LImited
- 当前专利权人: Fujitsu Media Devices,Fujitsu LImited
- 当前专利权人地址: JP Yokohama JP Kawasaki
- 代理机构: Arent Fox LLP
- 优先权: JP2006-290495 20061025
- 主分类号: H01L41/047
- IPC分类号: H01L41/047
摘要:
A piezoelectric thin-film resonator includes: a lower electrode supported by a substrate, a space being defined below the lower electrode; a piezoelectric film provided on the lower electrode and the substrate; and an upper electrode provided on the piezoelectric film so as to form a resonance portion in which the upper electrode faces the lower electrode across the piezoelectric film. At least one of the lower electrode and the upper electrode has an interconnection portion used to extract a signal from the resonance portion and located above the space. The at least one of the lower electrode and the upper electrode has a first mass per unit area in which the at least one of the lower electrode and the upper electrode contacts the piezoelectric film and a second mass per unit area in the resonance portion. The first mass per unit area is smaller than the second mass per unit area.
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