发明授权
- 专利标题: Vibration-type cantilever holder and scanning probe microscope
- 专利标题(中): 振动式悬臂支架和扫描探针显微镜
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申请号: US11595184申请日: 2006-11-09
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公开(公告)号: US07605368B2公开(公告)日: 2009-10-20
- 发明人: Masatsugu Shigeno , Masato Iyoki
- 申请人: Masatsugu Shigeno , Masato Iyoki
- 申请人地址: JP
- 专利权人: SII NanoTechnology Inc.
- 当前专利权人: SII NanoTechnology Inc.
- 当前专利权人地址: JP
- 代理机构: Adams & Wilks
- 优先权: JP2005-325774 20051110
- 主分类号: G11B9/00
- IPC分类号: G11B9/00 ; G01N23/00 ; G21K7/00
摘要:
A vibration-type cantilever holder holds a cantilever opposed to a sample. The holder supports a main body part of the cantilever at only its base end so that a probe at the free end of the cantilever can contact the sample. The holder has a cantilever-attaching stand on which the main body part is placed and fastened such that the cantilever is tilted at a predetermined angle with respect to the sample. A first vibration source is fastened to the cantilever-attaching stand and vibrates with a phase and an amplitude depending on a predetermined waveform signal, and the first vibration source is fastened at a first location to a holder main body. A second vibration source is fastened at a second location, which is spaced from the first location, to the holder main body and generates vibrations to offset vibrations traveling from the first vibration source to the cantilever-attaching stand and holder main body. The holder allows the cantilever to vibrate according to the vibrational characteristics of only the cantilever by counteracting additional vibrations.
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