Invention Grant
- Patent Title: Charged particle beam alignment method and charged particle beam apparatus
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Application No.: US10734261Application Date: 2003-12-15
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Publication No.: US07605381B2Publication Date: 2009-10-20
- Inventor: Mitsugu Sato , Tadashi Otaka , Makoto Ezumi , Atsushi Takane , Shoji Yoshida , Satoru Yamaguchi , Yasuhiko Ozawa
- Applicant: Mitsugu Sato , Tadashi Otaka , Makoto Ezumi , Atsushi Takane , Shoji Yoshida , Satoru Yamaguchi , Yasuhiko Ozawa
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Dickstein Shapiro LLP
- Priority: JP2001-161588 20010530; JP2001-208674 20010710
- Main IPC: H01L21/027
- IPC: H01L21/027
Abstract:
An object of the present invention is to provide a charged particle beam apparatus and an alignment method of the charged particle beam apparatus, which make it possible to align an optical axis of a charged particle beam easily even when a state of the charged particle beam changes. The present invention comprises calculation means for calculating a deflection amount of an alignment deflector which performs an axis alignment for an objective lens, a plurality of calculation methods for calculating the deflection amount is memorized in the calculation means, and a selection means for selecting at least one of the calculation methods is provided.
Public/Granted literature
- US20040124364A1 Charged particle beam alignment method and charged particle beam apparatus Public/Granted day:2004-07-01
Information query
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