发明授权
US07608507B2 NAND flash memory devices and methods of fabricating the same 失效
NAND闪存器件及其制造方法

NAND flash memory devices and methods of fabricating the same
摘要:
A NAND includes a device isolation pattern disposed in a region of a substrate defining a plurality of active regions. Memory transistors having memory gate patterns, constituting a cell string, cross the plurality of active regions. Select transistors are disposed over the memory transistors, and lower plugs are disposed on each side of the cell string to electrically connect the plurality of active regions on both sides of the cell string and the select transistors.
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