发明授权
US07608529B2 Method for selective laser crystallization and display panel fabricated by using the same
有权
用于选择性激光结晶的方法和使用该方法制造的显示面板
- 专利标题： Method for selective laser crystallization and display panel fabricated by using the same
- 专利标题（中）： 用于选择性激光结晶的方法和使用该方法制造的显示面板
-
申请号： US11987445申请日： 2007-11-30
-
公开(公告)号： US07608529B2公开(公告)日： 2009-10-27
- 发明人: Tsung-Yi Hsu , Chih-Hsiung Chang
- 申请人： Tsung-Yi Hsu , Chih-Hsiung Chang
- 申请人地址： TW Hsin-Chu
- 专利权人： AU Optronics Corp.
- 当前专利权人： AU Optronics Corp.
- 当前专利权人地址： TW Hsin-Chu
- 代理机构： Bacon & Thomas, PLLC
- 优先权： TW93138423A 20041210
- 主分类号： H01L21/20
- IPC分类号： H01L21/20 ; H01L21/36
摘要：
A display panel comprises a substrate having a displaying region (such as active organic light emitting region) and a circuit driving region; and a polysilicon layer formed on the substrate and having a first polysilicon portion and a second polysilicon portion respectively corresponding to the displaying region and circuit driving region, wherein the grain size of the second polysilicon portion crystallized by continuous wave (CW) laser annealing method is larger than that of the first polysilicon portion crystallized by excimer laser annealing (ELA) method.