发明授权
- 专利标题: Fully isolated photodiode stack
- 专利标题(中): 全隔离光电二极管堆叠
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申请号: US11657152申请日: 2007-01-24
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公开(公告)号: US07608874B2公开(公告)日: 2009-10-27
- 发明人: Jong-Jan Lee , Douglas J. Tweet , Sheng Teng Hsu
- 申请人: Jong-Jan Lee , Douglas J. Tweet , Sheng Teng Hsu
- 申请人地址: US WA Camas
- 专利权人: Sharp Laboratories of America, Inc.
- 当前专利权人: Sharp Laboratories of America, Inc.
- 当前专利权人地址: US WA Camas
- 代理机构: Law Office of Gerald Maliszewski
- 代理商 Gerald Maliszewski
- 主分类号: H01L31/062
- IPC分类号: H01L31/062 ; H01L31/113
摘要:
An array of fully isolated multi-junction complimentary metal-oxide-semiconductor (CMOS) filterless color imager cells is provided, together with an associated fabrication method. The method provides a bulk silicon (Si) substrate. A plurality of color imager cells are formed, either in the Si substrate, or in a single epitaxial Si layer formed over the substrate. Each color imager cell includes a photodiode set with a first, second, and third photodiode formed as a stacked multi-junction structure. A U-shaped (in cross-section) well liner, fully isolates the photodiode set from adjacent photodiode sets in the array. For example, each photodiode is formed from a p doped Si layer physically interfaced to a first wall. A well bottom physically interfaces to the first wall, and the p doped Si layer of the third, bottom-most, photodiode is part of the well bottom. Then, the photodiode sets may be formed from an n/p/n/p/n/p or n/p/p−/p/p−/p layered structure.
公开/授权文献
- US20070218613A1 Fully isolated photodiode stack 公开/授权日:2007-09-20
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