- 专利标题： Overhead transfer flange and support for suspending a substrate carrier
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申请号： US10764820申请日： 2004-01-26
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公开(公告)号： US07611318B2公开(公告)日： 2009-11-03
- 发明人: Michael R. Rice , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens , Eric A. Englhardt
- 申请人： Michael R. Rice , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens , Eric A. Englhardt
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Dugan & Dugan, PC
- 主分类号： B65G17/02
- IPC分类号： B65G17/02
摘要：
In a first aspect, a first apparatus is provided for use in supporting a substrate carrier. The first apparatus includes an overhead transfer flange adapted to couple to a substrate carrier body and an overhead carrier support. The overhead transfer flange has a first side and a second side opposite the first side that is wider than the first side. Numerous other aspects are provided.
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